Research Teams

This program is implemented by three thrusts.
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Thrust 1: Atomic-scale metrology and inspection

Dr. Ming-Wen Chu Prof. Chien-Chun Chen Prof. Ya-Ping Chiu

Thrust 2: Key materials for future devices

Prof. Po-Wen Chiu Dr. Fong-Zhi Chen Prof. Wen-Hao Chang Prof. Ching-Yuan Su

Thrust 3: Angstrom-scale device and circuit

Prof. An-Yeu (Andy) Wu Prof. Wei-Zen Chen Prof. Shao-Shiun (Steve) Chung Prof. Po-Tsun Liu Prof. Pin Su Prof. Ya-Chin King Prof. Chee-Wee Liu Prof. Yeong-Her Wang Dr. Jia-Min Shieh