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Research Teams
This program is implemented by three thrusts.
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Atomic-scale metrology and inspection
Dr. Ming-Wen Chu
Prof. Chien-Chun Chen
Prof. Ya-Ping Chiu
Key materials for future devices
Prof. Po-Wen Chiu
Dr. Fong-Zhi Chen
Prof. Wen-Hao Chang
Prof. Ching-Yuan Su
Angstrom-scale device and circuit
Prof. An-Yeu (Andy) Wu
Prof. Wei-Zen Chen
Prof. Shao-Shiun (Steve) Chung
Prof. Po-Tsun Liu
Prof. Pin Su
Prof. Ya-Chin King
Prof. Chee-Wee Liu
Dr. Jia-Min Shieh
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